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Ultrathin Strained Si-on-Insulator and SiGe-on-Insulator Created using Low Temperature Wafer Bonding and Metastable Stop Layers
Taraschi, Gianni, Pitera, Arthur J., McGill, Lisa M., Cheng, Zhi-Yuan, Lee, Minjoo L., Langdo, Thomas A., Fitzgerald, Eugene A.Volume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1629101
File:
PDF, 1.38 MB
english, 2004