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Characteristics of sub-atmospheric pressure glow discharge plasmas for preparation of a-C:H films
Kikuchi, Yusuke, Ogura, Masakata, Otsubo, Akira, Nishimura, Yoshimi, Nagata, Masayoshi, Yatsuzuka, MitsuyasuLanguage:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2016.05.008
Date:
May, 2016
File:
PDF, 6.02 MB
english, 2016