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Measurement of LER in Poly-Silicon Gates in MOSFETS by (S)TEM
Bruley, J, Kane, T, Boettcher, SVolume:
11
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s143192760550624x
Date:
August, 2005
File:
PDF, 246 KB
english, 2005