![](/img/cover-not-exists.png)
The Influence of Ga+ Ion Dose on Deposition Rate and Purity of Pt Films
Dunn, KA, Breslin, C, Thiel, BLVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927606068279
Date:
August, 2006
File:
PDF, 306 KB
english, 2006