Crystallinity estimation of area-selective Ge epitaxial...

Diamond Light Source Proceedings 2011 / 4 Vol. 1; Iss. SRMS-7

Crystallinity estimation of area-selective Ge epitaxial layer grown on Si substrate by means of high-resolution X-ray microdiffraction

Tsusaka, Y., Takano, H., Kagoshima, Y., Matsui, J., Park, S., Ishikawa, Y., Wada, K.
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Volume:
1
Language:
english
Journal:
Diamond Light Source Proceedings
DOI:
10.1017/s2044820110000559
Date:
April, 2011
File:
PDF, 149 KB
english, 2011
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