Micro-nano hybrid structures with manipulated wettability using a two-step silicon etching on a large area
Beom Seok Kim, Sangwoo Shin, Seung Jae Shin, Kyung Min Kim, Hyung Hee ChoVolume:
6
Language:
english
DOI:
10.1186/1556-276x-6-333
Date:
December, 2011
File:
PDF, 3.90 MB
english, 2011