Annealing and ultraviolet treatment of plasma fluorocarbon films for enhanced cohesion and stability
P. Chevallier, S. Holvoet, S. Turgeon, P. Horny, J. J. Pireaux, D. MantovaniVolume:
118
Year:
2010
Language:
english
Pages:
11
DOI:
10.1002/app.32621
File:
PDF, 716 KB
english, 2010