Annealing and ultraviolet treatment of plasma fluorocarbon...

Annealing and ultraviolet treatment of plasma fluorocarbon films for enhanced cohesion and stability

P. Chevallier, S. Holvoet, S. Turgeon, P. Horny, J. J. Pireaux, D. Mantovani
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Volume:
118
Year:
2010
Language:
english
Pages:
11
DOI:
10.1002/app.32621
File:
PDF, 716 KB
english, 2010
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