Combinatorial RF Magnetron Sputtering for Rapid Materials...

Microscopy and Microanalysis 2004 / 8 Vol. 10; Iss. S02

Combinatorial RF Magnetron Sputtering for Rapid Materials Discovery: Methodology and Applications

Rack, Philip D., Fowlkes, Jason D., Deng, Yuepeng
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Volume:
10
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927604880796
Date:
August, 2004
File:
PDF, 507 KB
english, 2004
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