FIB Prepared TEM Sample Lift-out Using MEMS Grippers

Microscopy and Microanalysis 2004 / 8 Vol. 10; Iss. S02

FIB Prepared TEM Sample Lift-out Using MEMS Grippers

Tuck, Kimberly, Ellis, Matthew, Geisberger, Aaron, Skidmore, George, Foster, Phil
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Volume:
10
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927604882692
Date:
August, 2004
File:
PDF, 128 KB
english, 2004
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