Characterization of Nanoindentations in Silicon by...

Microscopy and Microanalysis 2004 / 8 Vol. 10; Iss. S02

Characterization of Nanoindentations in Silicon by Cross-sectional TEM

Wen, Songqing, Bentley, James, Jang, Jae-il, Anderson, Ian M., Pharr, George M.
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Volume:
10
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927604882709
Date:
August, 2004
File:
PDF, 448 KB
english, 2004
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