More Than a Surface Probe: Investigation of Subsurface...

Microscopy and Microanalysis 2004 / 8 Vol. 10; Iss. S02

More Than a Surface Probe: Investigation of Subsurface Charging in Buried Oxide Layers in Silicon Using Kelvin Probe Microscopy

Stevens-Kalceff, Marion A.
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Volume:
10
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927604884538
Date:
August, 2004
File:
PDF, 137 KB
english, 2004
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