Influence of the N2 on TiN Thin Film Grown by PLD

Microscopy and Microanalysis 2004 / 8 Vol. 10; Iss. S02

Influence of the N2 on TiN Thin Film Grown by PLD

Gonzalez-Valenzuela, Cesar, Duarte-Moller, Jose Alberto, De la Cruz, Wencel, Castillon Barraza, Felipe, Diaz, J. Antonio, Cota Araiza, Leonel
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Volume:
10
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927604886173
Date:
August, 2004
File:
PDF, 188 KB
english, 2004
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