Advanced Characterization of Novel Gate Stacks for Si CMOS by Scanning Transmission Electron Microscopy
Stemmer, Susanne, Agustin, Melody D, Yang, Yan, Schmidt, Steffen, Foran, Brendan, Bersuker, Gennadi, Schlom, D GVolume:
10
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927604886343
Date:
August, 2004
File:
PDF, 344 KB
english, 2004