Determination of the Spatial Resolution Function in Energy...

Microscopy and Microanalysis 2004 / 8 Vol. 10; Iss. S02

Determination of the Spatial Resolution Function in Energy Filtered TEM and Application to Thin Gate Oxide Measurements at 80 eV Energy Loss

Jullian, S., Pantel, R., Juhel, M., Kwakman, L.F.T, Vincent, G.
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Volume:
10
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927604887737
Date:
August, 2004
File:
PDF, 479 KB
english, 2004
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