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Sample Preparation for Precise and Quantitative Electron Holography Analysis of Electrostatic Potential in Semiconductor Devices
Han, M-G, Li, J, Xie, B, Fejes, P, Conner, J, Taylor, B, McCartney, M RVolume:
11
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927605504409
Date:
August, 2005
File:
PDF, 140 KB
english, 2005