Focused Ion Beam Based Micromanipulation to Form Air Bridge Interconnect
Progl, C, Vitarelli, J, Russell, PEVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927606067158
Date:
August, 2006
File:
PDF, 431 KB
english, 2006