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Determination of Strain in the Silicon Channel Induced by a Metal Electrode
Floresca, HC, Wang, J, Kim, M, Kim, J, Kang, CY, Choi, R, Song, SC, Tseng, HH, Lee, BH, Jammy, RVolume:
13
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s143192760707465x
Date:
August, 2007
File:
PDF, 584 KB
english, 2007