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3D characterization and metrology of nanostructures by electron tomography
Hernandez, JC, Hungria, AB, Perez-Omil, JA, Moreno, MS, Coronado, EA, Cempura, G, Kruk, A, Midgley, PAVolume:
14
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927608087394
Date:
August, 2008
File:
PDF, 173 KB
english, 2008