3D characterization and metrology of nanostructures by...

Microscopy and Microanalysis 2008 / 8 Vol. 14; Iss. S2

3D characterization and metrology of nanostructures by electron tomography

Hernandez, JC, Hungria, AB, Perez-Omil, JA, Moreno, MS, Coronado, EA, Cempura, G, Kruk, A, Midgley, PA
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Volume:
14
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927608087394
Date:
August, 2008
File:
PDF, 173 KB
english, 2008
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