Microstructural and Radial Distribution Function Analysis of Hydrogenated Silicon, Germanium, and Silicon-Germanium Alloy Thin Films
John, DB Saint, Podraza, NJ, Gauntt, BD, Li, J, Dickey, ECVolume:
14
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927608087631
Date:
August, 2008
File:
PDF, 175 KB
english, 2008