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Aberration-Corrected STEM Imaging and 2-D Elemental-Resolved Valence-EELS Mapping of Ru-TaN Ultrathin Barrier Layer
Xin, HL, Muller, DAVolume:
15
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609095294
Date:
July, 2009
File:
PDF, 773 KB
english, 2009