Dual Lens Electron Holography for High Spatial Resolution...

Microscopy and Microanalysis 2014 / 08 Vol. 20; Iss. S3

Dual Lens Electron Holography for High Spatial Resolution Junction and Strain Mapping of Semiconductor Devices

Wang, Y.Y., Bruley, J.
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Volume:
20
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s143192761400292x
Date:
August, 2014
File:
PDF, 1.49 MB
english, 2014
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