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Tracking subsurface ion radiation damage with metal–oxide–semiconductor device encapsulation
Kulkarni, Dhruva D., Shyam, Radhey E., Cutshall, Daniel B., Field, Daniel A., Harriss, James E., Harrell, William R., Sosolik, Chad E.Volume:
30
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2014.386
Date:
May, 2015
File:
PDF, 309 KB
english, 2015