In Situ FTIR Investigations Of Polymer Surface Modification In Downstream Microwave Plasma Etching
Leu, Jihperng, Jensen, K.F.Volume:
154
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-154-253
Date:
January, 1989
File:
PDF, 525 KB
english, 1989