Regrowth of Damaged Layers in Diamond Produced by Ion...

MRS Proceedings 1989 / 1 Vol. 162

Regrowth of Damaged Layers in Diamond Produced by Ion Implantation

Sandhu, G. S., Liu, B., Parikh, N. R., Hunn, J. D., Swanson, M. L., Wichert, Th., Deicher, M., Skudlik, H., Lennard, W. N., Mitchell, I. V.
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Volume:
162
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-162-189
Date:
January, 1989
File:
PDF, 302 KB
english, 1989
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