Analysis for the Characterization of Oxygen Implanted...

MRS Proceedings 1990 / 1 Vol. 209

Analysis for the Characterization of Oxygen Implanted Silicon (SIMOX) by Spectroscopic Ellipsometry

Doss, M.G., Chandler-Horowitz, D., Marchiando, J. F., Krause, S., Seraphin, S.
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Volume:
209
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-209-493
Date:
January, 1990
File:
PDF, 287 KB
english, 1990
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