MOCVD Growth of Copper and Copper Oxide Films from Bis-β-Diketonate Complexes of Copper. The Role of Carrier Gas on Deposit Composition.
Rees, William S., Caballero, Celia R.Volume:
250
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-250-297
Date:
January, 1991
File:
PDF, 208 KB
english, 1991