Surface Characterization of Chemical-Mechanical Polished...

MRS Proceedings 1992 / 1 Vol. 259

Surface Characterization of Chemical-Mechanical Polished GaAs by Inclined Bragg Plane Triple Crystal X-Ray Diffraction

Wang, Victor S., Matyi, Richard J.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
259
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-259-335
Date:
January, 1992
File:
PDF, 394 KB
english, 1992
Conversion to is in progress
Conversion to is failed