In Situ Analysis of Surface Contaminant Desorption during...

MRS Proceedings 1992 / 1 Vol. 259

In Situ Analysis of Surface Contaminant Desorption during Low-Temperature Silicon Substrate Cleaning using Reflection Electron Energy Loss Spectrometry

Wong, Selmer S., Nikzad, Shouleh, Ahn, Channing C., Smith, Aimee L., Atwater, Harry A.
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Volume:
259
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-259-449
Date:
January, 1992
File:
PDF, 357 KB
english, 1992
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