Defect Annihilation in Czochralski-Grown Silicon During...

MRS Proceedings 1992 / 1 Vol. 262

Defect Annihilation in Czochralski-Grown Silicon During Out-Diffusion Process Probed with Variable-Energy Positron Beam

Kitano, T., Wei, L., Tabuki, Y., Tanigawa, S., Mikoshiba, H.
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Volume:
262
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-262-707
Date:
January, 1992
File:
PDF, 295 KB
english, 1992
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