Reliability of Submicron Mosfet's with Deposited Gate...

Reliability of Submicron Mosfet's with Deposited Gate Oxides under F-N Injection and Hot-Carrier Stress

Hao, Ming-Yin, Lee, Jack C., Chen, Ih-Chin, Teng, Clarence W.
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Volume:
265
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-265-237
Date:
January, 1992
File:
PDF, 367 KB
english, 1992
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