Maskless Patterning of Cr Films Using Focused Ion Beams

MRS Proceedings 1983 / 1 Vol. 27

Maskless Patterning of Cr Films Using Focused Ion Beams

Gamo, K., Moriizumi, K., Matsui, T., Namba, S.
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Volume:
27
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-27-531
Date:
January, 1983
File:
PDF, 868 KB
english, 1983
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