Lattice Location of Supersaturated Arsenic Atoms in Silicon...

MRS Proceedings 1992 / 1 Vol. 279

Lattice Location of Supersaturated Arsenic Atoms in Silicon Studied by Channeled Ion Beam

Xu, Li, Tsien, Peihsin, Li, Zhijian
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Volume:
279
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-279-195
Date:
January, 1992
File:
PDF, 366 KB
english, 1992
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