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A New Quantitative Roughness Measurement and its Application in the Polysilicon/Silicon Dioxide Interface
Lin, Su-Heng, Hatalis, Miltiadis K.Volume:
280
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-280-285
Date:
January, 1992
File:
PDF, 1003 KB
english, 1992