Phosphorus Glass Doping of Polycrystalline Silicon During...

MRS Proceedings 1992 / 1 Vol. 283

Phosphorus Glass Doping of Polycrystalline Silicon During Rapid Thermal Annealing

Hartiti, Bouchaib, Slaoui, Abdelilah, Stuck, Roland, Muller, Jean-Claude, Siffert, Paul
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Volume:
283
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-283-739
Date:
January, 1992
File:
PDF, 290 KB
english, 1992
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