Vacuum Ultraviolet Spectroscopy Study of Excimer Lasergfenerated Plasmas: Spatial Distribution of Plasma
Chrise, D.B., Mehbnan, G., Horwit, J.S., Burkhalte, P.G., Newman, D.A., Leuchtner, R.E.Volume:
285
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-285-33
Date:
January, 1992
File:
PDF, 304 KB
english, 1992