Micromechanical Behaviour of Amorphous Hydrogenated Silicon Carbide Films
Meneve, J., Jacobs, R., Lostak, F., Eersels, L., Dekempeneer, E., Smeets, J.Volume:
308
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-308-671
Date:
January, 1993
File:
PDF, 885 KB
english, 1993