Degradation in Oxide Reliability Due to the Presence of Nitrogen in the Oxidation Ambient
Hames, Greg A., Wortman, J. J., Beck, S. E., Shemanski, B. J.Volume:
318
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-318-645
Date:
January, 1993
File:
PDF, 302 KB
english, 1993