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Characterization of thin Chemical/Native Oxides on Si (100) by Auger and Angle-Resolved XPS
Pylant, Eddie D., Hoener, Carolyn F., Arendt, Mark F., Witowski, BobVolume:
318
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-318-99
Date:
January, 1993
File:
PDF, 624 KB
english, 1993