Assessment of Carbon Contamination in Titanium Nitride Films Deposited from the Reaction of Titanium (IV) Ciiloride and Amines
Williams, Keith B., Stewart, Ogie, Reck, Gene P., Proscia, James W.Volume:
327
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-327-121
Date:
January, 1993
File:
PDF, 293 KB
english, 1993