Electron Cyclotron Resonance Plasma Chemical Vapour Deposition of Silicon Carbide Thin Films Using Ditertiary Butyl Selane
Boumerzoug, Mohamed, Boudreau, Marcel, Mascher, Peter, Jessop, Paul E.Volume:
339
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-339-381
Date:
January, 1994
File:
PDF, 325 KB
english, 1994