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Characterization of Tantalum Oxide Thin Film and its Electrodes for DRAM's Capacitor Application
Park, Jong-Wan, Jeon, Seok-Ryong, Lee, Jae-Suk, Lee, Jeong-YoubVolume:
355
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-355-483
Date:
January, 1994
File:
PDF, 886 KB
english, 1994