Surface Characterization of Arsenic Implanted Silicon...

MRS Proceedings 1984 / 1 Vol. 37

Surface Characterization of Arsenic Implanted Silicon (100): A New Insight into the Inhibition of Aluminum/Silicon Interdiffusion

Herbots, Nicole, Gloesener, D., Van Loenen, E. J., Fischer, A. E. M. J.
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Volume:
37
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-37-613
Date:
January, 1984
File:
PDF, 290 KB
english, 1984
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