Effect of Thickness and Substrates on the Mechanical Properties of Tantalum and Tantalum Nitride Thin Films
Saha, Ranjana, Inturi, Rama B., Barnard, John A.Volume:
403
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-403-259
Date:
January, 1995
File:
PDF, 341 KB
english, 1995