![](/img/cover-not-exists.png)
Polysilicon Thin Film Transistors with Cobalt amd Nickel Silicide Source and Drain Contacts
Sarcona, G. T., Hatalis, M. K.Volume:
424
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-424-159
Date:
January, 1996
File:
PDF, 568 KB
english, 1996