![](/img/cover-not-exists.png)
Optical and Electrical Properties of Undoped Microcrystalline Silicon Deposited by the VHF-GD with Different Dilutions of Silane in Hydrogen
Beck, N., Orres, P., Fric, J., Remeš, Z., Poruba, A., Stuchlíková, HA, Fejfar, A., Wyrsch, N., Vaněček, M., Kočka, J., Shah, A.Volume:
452
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-452-761
Date:
January, 1996
File:
PDF, 473 KB
english, 1996