Nitric Oxide Rapid Thermal Nitridation of Thin Gate Oxides
Kuehne, J., Hattangady, S., Piccirillo, J., Xing, G. C., Miner, G. E., Lopes, D.Volume:
470
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-470-381
Date:
January, 1997
File:
PDF, 402 KB
english, 1997