Comparison of Conventional and Self-Aligned a-Si:H Thin...

MRS Proceedings 1997 / 1 Vol. 471

Comparison of Conventional and Self-Aligned a-Si:H Thin Film Transistors

Yang, Chien-Sheng, Read, Walter W., Arthur, Chris B., Parsons, Gregory N.
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Volume:
471
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-471-179
Date:
January, 1997
File:
PDF, 353 KB
english, 1997
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