Fabrication of Ferroelectric Fet with Metal/PZT/SiO2/Si Structure
Yu, Jun, Zhou, Wenli, Xie, Jifan, Zheng, Yuankai, Dong, Xiaoming, Liu, GangVolume:
526
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-526-199
Date:
January, 1998
File:
PDF, 582 KB
english, 1998