Comparison of Ultra-low-energy Ion Implantation of Boron...

MRS Proceedings 1999 / 1 Vol. 568

Comparison of Ultra-low-energy Ion Implantation of Boron and BF2

Park, Jihwan, Hwang, Hyunsang
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Volume:
568
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-568-71
Date:
January, 1999
File:
PDF, 272 KB
english, 1999
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