Thickness-Dependent Micro-Raman Measurement of Poly-Si Films Prepared by Metal-Induced-Crystallization using a Ni Layer
Muramatsu, Shin-ichi, Minagawa, Yasushi, Oka, Fumihito, Yazawa, YoshiakiVolume:
609
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-609-a9.6
Date:
January, 2000
File:
PDF, 214 KB
english, 2000